Production equipment for semiconductors, LCDs, and PCBs
【Manufacturing Equipment ? Upstream Processes】
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Coater/developers, scrubbers, wafer cleaning equipment, batch-cleaning equipment, spin processors, post-CMP cleaners, lamp annealers |
【Inspection, Evaluation, and Measurement Systems】
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Film thickness measurement systems, mask coordinate-measurement systems, mask line-width measurement systems, wafer inspection systems |
